- Spin and spray coating of photoresist- Dry film photoresist lamination- Dispensing of photoresist- Electrodeposition of photoresist
- Exposure with double side alignment
- Si, SiO2, SiN LPCVD and PECVD- Sputtering and E-beam evaporation- Au and AuSn electroplating- Parylene coating- Hot roll and vacuum lamination
- Si DRIE, RIE and plasma etching- Si KOH, TMAH, Vapor HF etching- Metal wet etching- Si plasma dicing- Polymer surface modification
- Selective laser micromachining- High speed laser drilling- UV laser marking
- Atmospheric plasma etch- SEM / EDS analysis