ViaMEMS Technologies, Inc.


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Services





Photolithography



- Spin and spray coating of photoresist
- Dry film photoresist lamination
- Dispensing of photoresist
- Electrodeposition of photoresist

- Exposure with double side alignment



Thin film deposition



- Si, SiO2, SiN LPCVD and PECVD
- Sputtering and E-beam evaporation
- Au and AuSn electroplating
- Parylene coating
- Hot roll and vacuum lamination



dry and wet etch



- Si DRIE, RIE and plasma etching
- Si KOH, TMAH, Vapor HF etching
- Metal wet etching
- Si plasma dicing
- Polymer surface modification



back end processes



- Selective laser micromachining
- High speed laser drilling
- UV laser marking

- Atmospheric plasma etch
- SEM / EDS analysis